Mems spectrometer

This miniature MEMS spectrometer covers spectral regions where InGaAs linear detector array technology lacks sensitivity and optical throughput . At present most spectrometers , in particular for wavelengths longer than the VIS, are comparatively large, stationary and expensive. With the advent of micro- electro-mechanical systems ( MEMS ), it became possible to build pocket-sized spectrometers for various spectral ranges, including the near-IR or mid-IR. In the first part of this paper we discuss the UWA MEMS -based Fabry–Pérot spectrometer , its design and issues to be solved.

MEMS mass spectrometers have taken decades to reach market.

The MEMS approach to integration is first briefly describe and the difficulties of miniaturizing mass spectrometers are outlined.

MEMS components for ionization and mass filtering are then reviewe .

MEMS technology involves the use of specialist semiconductor processes to build tiny structures on silicon wafers. Precision features are fabricated by selectively etching away silicon, or adding new layers. Some of their benefits include volume production capability, robustness, and cost -effectiveness. The device, a few hundred micrometres long and wide, consists of a . The MS series are thumb-sized (2 × × 1 mm) spectrometer heads developed for installation into mobile measurement equipment by . Ultra-compact mini- spectrometer integrating MEMS and image sensor technologies. Finger-tip size ultra-compact spectrometer head supporting high sensitivity and long wavelength region.

Hermetically sealed packaging provides improved humidity resistance. It is less than half of the volume of the previous generation of miniature spectrometers and because of that it landed on our radar as an interesting new capability for portable embedded . With recent advancements in materials and fabrication techniques like nanoimprint and MEMS based lithography, compact microcontrollers and . See 3- 8nm micro- spectrometer. MEMS -FPI sensors consist of an InGaAs PIN photodiode and a . EMS microspectrometers offer great hope for low-cost, lightweight, and robust spectrometers, paving the way for pervasive use in many fields. In this invited paper, we report on nearly years of development on MEMS spectrometers in our research group, beginning with devices designed for the . MEMS ) for nonoptical laboratory instruments. The classification of the various spectrometer types is determined by the dispersion element or approach used and includes microspectrometers . Near- infrared (NIR) spectroscopy , and the use of molecular IR spectrum . Block offers the widest gap-free tunable mid-IR laser on the market (-1 microns).

Our research lasers and OEM laser modules are compact, fast and widely tunable. Electrochemical impedance spectroscopy based MEMS sensors for phthalates detection in water and juices. School of Engineering and Advanced Technology, Massey . A single pixel detector measures serially the intensity at selected .