NEMS form the logical next miniaturization step from so-called microelectromechanical systems, or MEMS devices. NEMS typically integrate transistor-like nanoelectronics with mechanical . Microelectromechanical systems is the technology of microscopic devices , particularly those with moving parts. It merges at the nano-scale into nanoelectromechanical systems ( NEMS ) and nanotechnology.
MEMS are also referred to as micromachines in Japan, or micro systems technology (MST) in Europe.
As IC fabrication technology continues to scale toward deep submicron and nanometer feature sizes, a variety of nanoelectromechanical systems ( NEMS ) can be envisioned in the foreseeable future.
NEMS applications are envisaged in sensing, displays, portable power generation, energy harvesting, drug delivery and imaging.
Examples for NEMS comprise nanoresonators and nanoaccelerometers, integrated peizoresistive detection devices. Applications that have either already reached the market .